| VEGA
Electron Optics
|
The
VEGA and MV2300 series of Scanning Electron Microscopes are equipped with an
inventive new four-lens electron optical column and employ a unique system
of electron optics control based on a PC, providing the user with powerful
and distinct advantages over conventional SEMs.
The column consists of:
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a high brightness tungsten electron
gun |
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an electrogmagnetic beam centering
system below the anode |
|
a doublet condenser lens system with
spray diaphragm |
|
an intermediate lens with its own
electromagnetic centering system |
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a low-aberration, conical objective
lens with integral scan and stigmator coils |
This
arrangement allows great flexibility in the choice of different display and
scan modes. Full computer control of the optical system allows very easy
and fast switching from one working mode to another with stored preset
working conditions. In combination with
automated procedures for gun
alignment, focusing, and astigmatism correction, they provide the user
with extraordinary ease of use, speed, stability, and reproducibility.
Unique electron optics and sophisticated computer control make the VEGA the
ideal SEM, especially for multi-user labs which must accommodate users of
all skill levels.
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