 |
VEGA 5136-XM Variable
Pressure Scanning
Electron Microscope
The new VEGA 5136-XM is the ultimate
state-of-the-art VPSEM, providing exceptional large sample handling
capabilities, as well as high performance backscattered and secondary
electron imaging at
chamber pressures up to 2000Pa with no specimen preparation.
Now available with Tescan's new LVSTD variable
pressure secondary electron detector.
|
|
Summary Specification |
| Electron
Optics |
4-lens Optics, Resolution,
Depth, Field, Fisheye Imaging Modes |
| Resolution |
3.5nm in
Hi-vac mode
5.5nm in VP mode
|
| Magnification |
4x - 500,000x |
| Accelerating
Voltage |
500V -
30kV, in 100V steps |
| Probe
Current |
1pA - 2uA |
| Scanning |
Scanning
speed adjustable from 600ns - 10ms per pixel, in steps or continuously |
| Image
Sizes |
Up to 4096 x 4096 pixels,
adjustable separately for live and store images; Selectable square or
rectangular format |
| Microscope
Control and Automation |
Fully PC
controlled under Microsoft Windows™ 2000 or XP. Extensive automation of
SEM setup and control functions. |
| Remote
Control |
Standard Remote Control and
Remote Diagnostics |
| Chamber |
300mm x
330mm Internal Dimensions |
| Specimen
Stage |
5-axis Fully Motorized
Compucentric stage, X=130mm, Y=130mm, Z=100mm, Rotation=360°
continuous, Tilt=-10° to +70° |
|
|
