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VEGA 5136-SB Variable Pressure Scanning Electron Microscope

Need a high performance VPSEM that doesn't break the bank? 

The VEGA 5136-SB VPSEM can image samples at chamber pressures up to 2000Pa with no specimen preparation.

Now available with Tescan's new LVSTD variable pressure secondary electron detector.

 

Summary Specification

Electron Optics    4-lens Optics, Resolution, Depth, Field, Fisheye Imaging Modes

Resolution   

3.5nm in Hi-vac mode

5.5nm in VP mode

Magnification    4x - 500,000x
Accelerating Voltage    500V - 30kV, in 100V steps
Probe Current    1pA - 2uA
Scanning    Scanning speed adjustable from 600ns - 10ms per pixel, in steps or continuously
Image Sizes    Up to 4096 x 4096 pixels, adjustable separately for live and store images; Selectable square or rectangular format
Microscope Control and Automation   Fully PC controlled under Microsoft Windows™ 2000 or XP. Extensive automation of SEM setup and control functions
Remote Control    Standard Remote Control and Remote Diagnostics
Chamber    160mm internal diameter
Specimen Stage    6-axis Eucentric stage, X=40mm, Y=24mm, Z=27mm, z'=6mm, Rotation=360° continuous, Tilt=-90° to +90°
 

 

 
CamScan USA Inc.
508 Thomson Park Drive
Cranberry Twp., PA 16066
Tel -  (724) 772-7433
Fax - (724) 772-7434
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