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VEGA 5130-XM Scanning
Electron Microscope
The new VEGA 5130-XM SEM provides
exceptional large sample handling, with the ability to fully image
samples over 7 inches in diameter and over 4 inches tall on a fully
automated compucentric stage!
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Summary Specification |
| Electron
Optics |
4-lens Optics, Resolution,
Depth, Field, Fisheye Imaging Modes |
| Resolution |
3.5nm |
| Magnification |
4x - 500,000x |
| Accelerating
Voltage |
500V -
30kV, in 100V steps |
| Probe
Current |
1pA - 2uA |
| Scanning |
Scanning
speed adjustable from 600ns - 10ms per pixel, in steps or continuously |
| Image
Sizes |
Up to 4096 x 4096 pixels,
adjustable separately for live and store images; Selectable square or
rectangular format |
| Microscope
Control and Automation |
Fully PC
controlled under Microsoft Windows™ 2000 or XP. Extensive automation of
SEM setup and control functions. |
| Remote
Control |
Standard Remote Control and
Remote Diagnostics |
| Chamber |
300mm x
330mm Internal Dimensions |
| Specimen
Stage |
5-axis Fully Motorized
Compucentric stage, X=130mm, Y=130mm, Z=100mm, Rotation=360°
continuous, Tilt=-10° to +70° |
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