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VEGA 5130-SB Scanning
Electron Microscope
The VEGA 5130-SB SEM provides a host of
advanced features at a surprisingly competitive price. Including the
same innovative 4-lens electron optics and computer automation as found
on the whole VEGA series, the 5130-SB has a price/performance ratio
that's hard to beat.
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Summary Specification |
| Electron
Optics |
4-lens Optics, Resolution,
Depth, Field, Fisheye Imaging Modes |
| Resolution |
3.5nm |
| Magnification |
4x - 500,000x |
| Accelerating
Voltage |
500V -
30kV, in 100V steps |
| Probe
Current |
1pA - 2uA |
| Scanning |
Scanning
speed adjustable from 600ns - 10ms per pixel, in steps or continuously |
| Image
Sizes |
Up to 4096 x 4096 pixels,
adjustable separately for live and store images; Selectable square or
rectangular format |
| Microscope
Control and Automation |
Fully PC
controlled under Microsoft Windows™ 2000 or XP. Extensive automation of
SEM setup and control functions |
| Remote
Control |
Standard Remote Control and
Remote Diagnostics |
| Chamber |
160mm
internal diameter |
| Specimen
Stage |
6-axis Eucentric stage,
X=40mm, Y=24mm, Z=27mm, z'=6mm, Rotation=360° continuous, Tilt=-90° to
+90° |
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