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VEGA 5130-MM Scanning
Electron Microscope
The VEGA 5130-MM SEM provides high
performance 4-lens optics, extensive computer automation, and a fast,
precise 6-axis eucentric motorized stage - all for under $100k!
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Summary Specification |
| Electron
Optics |
4-lens Optics, Resolution,
Depth, Field, Fisheye Imaging Modes |
| Resolution |
3.5nm |
| Magnification |
4x - 500,000x |
| Accelerating
Voltage |
500V -
30kV, in 100V steps |
| Probe
Current |
1pA - 2uA |
| Scanning |
Scanning
speed adjustable from 600ns - 10ms per pixel, in steps or continuously |
| Image
Sizes |
Up to 4096 x 4096 pixels,
adjustable separately for live and store images; Selectable square or
rectangular format |
| Microscope
Control and Automation |
Fully PC
controlled under Microsoft Windows™ 2000 or XP. Extensive automation of
SEM setup and control functions. |
| Remote
Control |
Standard Remote Control and
Remote Diagnostics |
| Chamber |
195mm
internal diameter |
| Specimen
Stage |
6-axis Motorized Eucentric stage,
X=40mm (Motorized), Y=40mm (Motorized), Z=27mm, z'=6mm, Rotation=360°
continuous (Motorized), Tilt=-70° to
+90° |
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